4. Image analysis
  5. Pattern recognition
  6. Template matching

Akiyuki Sugiyama

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Dimension measuring SEM system, method of evaluating shape...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Pattern matching method and computer program for executing...

Image analysis – Pattern recognition – Template matching
Reexamination Certificate

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Pattern measurement apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Sample dimension inspecting/measuring method and sample...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2277035

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