Pattern matching method and computer program for executing...

Details Pattern matching method and computer program for executing... Pattern matching method and computer program for executing...

2011-04-12

2011-04-12

Chawan, Sheela C (Department: 2624)

Image analysis

Pattern recognition

Template matching

C382S295000

Reexamination Certificate

active

07925095

ABSTRACT:
A pattern matching method which is capable of selecting a suitable measurement object pattern, even on a sample containing a periodic structure, and a computer program for making a computer execute the pattern matching. In a pattern matching method which executes matching between the design data-based first image of an object sample, and a second image, whether or not a periodic structure is included in a region to execute the matching is determined, so as to select a pattern, based on distance between an original point which is set in said image, and the pattern configuring said periodic structure, in the case where the periodic structure is included in said region, and to select a pattern based on coincidence of the pattern in said image, in the case where the periodic structure is not included in said region, and a computer program product.

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Japanese Office Action issued in Japanese Patent Application No. JP 2006-084445, dated Feb. 1, 2011.

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