4. Etching a substrate: processes
  5. Gas phase etching of substrate

Akiteru Koh

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Dry etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Dry-etching method

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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