4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Akira Kagoshima

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Apparatus and method for producing semiconductors

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Data processing apparatus for semiconductor processing...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Disturbance-free, recipe-controlled plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Disturbance-free, recipe-controlled plasma processing system...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Disturbance-free, recipe-controlled plasma processing system...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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Profile ID: LFUS-PAI-P-2407215

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