4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Akihiko Isao

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Apparatus for forming an inhomogeneous optical layer

Coating apparatus – Program – cyclic – or time control
Patent

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Apparatus for forming an inhomogeneous optical layer

Coating apparatus – Program – cyclic – or time control
Patent

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Method for forming an inhomogeneous optical layer

Coating processes – Optical element produced
Patent

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Method for forming an inhomogeneous optical layer

Coating processes – Optical element produced
Patent

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Method of manufacturing phase-shifting photomask blank

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-519399

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