Coating apparatus – Program – cyclic – or time control
Patent
1982-04-29
1983-11-22
Hoffman, James R.
Coating apparatus
Program, cyclic, or time control
118719, 118720, 118729, B05D 134, B05D 506
Patent
active
044162170
ABSTRACT:
An inhomogeneous optical layer is formed on a surface of a substrate in a vacuum coater, in which the substrate is moved along a travelling path having path sections and two substances are evaporated from their respective sources and both of the substances are deposited on a common surface section of the surface. In such an operation, the deposition rate of each of the substances is varied monotonously along the path in each of the path section in order that, in a layer formed by the deposition on the substrate, the content of each of the substances is varied monotonously in the direction of thickness. If the refractive index of one of the substances is different from that of the other of the substances, the resultant refractive index in the layer is varied monotonously in the direction of the thickness of the layer.
REFERENCES:
patent: 3520716 (1970-07-01), Okamoto et al.
Isao Akihiko
Mizorogi Hirotsugu
Nakamura Kazuo
Hoffman James R.
Nihon Shinku Gijutsu Kabushiki Kaisha
Ulvac Seimaku Kabushiki Kaisha
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