4. Coating processes
  5. Coating by vapor, gas, or smoke

Aelan Mosden

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Method and system for treating a hard mask to improve etch...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Method of etching high aspect ratio features

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Processing system and method for chemically treating a TERA...

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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System and method of removing chamber residues from a plasma...

Coating processes – Coating by vapor – gas – or smoke
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Profile ID: LFUS-PAI-P-2332498

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