4. Optical: systems and elements
  5. Deflection using a moving element
  6. By moving a reflective element

Advanced NuMicro Systems, Inc.

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Dimensions for a MEMS scanning mirror with ribs and tapered...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Laser projection display and illumination device with MEMS...

Optics: image projectors – Reflector
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MEMS device with off-axis actuator

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
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MEMS load cell and strain sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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MEMS mirror driven by one motion with oscillations of...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
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