MEMS device with off-axis actuator

Details MEMS device with off-axis actuator MEMS device with off-axis actuator

2009-02-25

2011-10-11

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S199100, C359S224100

Reexamination Certificate

active

08035874

ABSTRACT:
A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the frame. Another MEMS mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.

REFERENCES:
patent: 2008/0238592 (2008-10-01), Ko et al.
patent: 2009/0284816 (2009-11-01), Davis et al.

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