4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Plasma generating

Advanced Micro-Fabrication Equipment, Inc. Asia

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Gas distribution assembly for use in a semiconductor work...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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RF matching network of a vacuum processing chamber and...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Silicon carbide gas distribution plate and RF electrode for...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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