4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Electrolytic

ACM Research, Inc.

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Electropolishing metal layers on wafers having trenches or...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Integrating metal layers with ultra low-K dielectrics

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method and apparatus for end-point detection

Optics: measuring and testing – Dimension – Width or diameter
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Method for electropolishing metal on semiconductor devices

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface...
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Methods and apparatus for electropolishing metal...

Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Simple alternating current
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