Electrolysis: processes – compositions used therein – and methods – Electrolytic erosion of a workpiece for shape or surface... – Simple alternating current
Reexamination Certificate
2005-01-04
2005-01-04
Ryan, Patrick (Department: 1745)
Electrolysis: processes, compositions used therein, and methods
Electrolytic erosion of a workpiece for shape or surface...
Simple alternating current
C205S659000, C205S680000, C204S22400M, C204S212000
Reexamination Certificate
active
06837984
ABSTRACT:
An apparatus for electropolishing a wafer includes a wafer chuck and a stationary jet. The wafer chuck is configured to rotate and translate the wafer. The stationary jet is configured to apply an electrolyte to the wafer when the wafer is translated and rotated by the wafer chuck.
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ACM Research, Inc.
Parsons Thomas H.
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