4. Measuring and testing
  5. Fluid pressure gauge
  6. Diaphragm

Kimitoshi Satou

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Semiconductor device manufacturing method

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Semiconductor pressure sensor including multiple silicon substra

Measuring and testing – Fluid pressure gauge – Diaphragm
Patent

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Thin film accelerometer

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-381019

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