Scanning electron microscope and a method of displaying cross se

Details Scanning electron microscope and a method of displaying cross se Scanning electron microscope and a method of displaying cross se

1990-09-17

1991-10-15

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250396ML, 2504421, H01J 3728

Patent

active

050576895

ABSTRACT:
A scanning electron microscope is disclosed in which an objective lens includes a first pole piece and a second pole piece. The first pole piece is provided with a hole through which an electron beam passes, and is disposed between an electron gun for emitting the electron beam and the second pole piece. The second pole piece has a planar portion on which a specimen is placed, and the second pole piece being mounted on a supporting block movable in a plane substantially perpendicular to the projecting direction of the electron beam.

REFERENCES:
patent: 4380703 (1983-04-01), Schmitt
patent: 4393309 (1983-07-01), Norioka
patent: 4567369 (1986-01-01), Smith
patent: 4804840 (1989-02-01), Ichihashi
patent: 4866280 (1989-09-01), Ohtaka
patent: 4928010 (1990-05-01), Saito et al.

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