Image reversal negative working O-naphthoquinone diazide and cro

Details Image reversal negative working O-naphthoquinone diazide and cro Image reversal negative working O-naphthoquinone diazide and cro

1991-12-30

1993-10-26

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430165, 430191, 430193, 430296, 430328, 430330, 430942, 430967, G03F 730

Patent

active

052565220

ABSTRACT:
A process for converting a normally positive working photosensitive composition to a negative working composition is disclosed. One forms a composition containing an alkali soluble resin, a 1,2 quinone diazide-4-sulfonyl compound and an acid catalyzed crosslinker in a solvent mixture. After drying and imagewise exposing, the composition is baked and developed to produce a negative image. The image-reversal negative-working photoresists of this invention have superior storage stability and shelf life.

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