Processing for stripping organic material

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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134 1, 156646, 156655, 156668, 156345, 20419236, 20429838, B44C 122, B29C 3700, C03C 1500, C03C 2506

Patent

active

049832549

ABSTRACT:
A process for stripping an organic material, which comprises forming gases including a gas containing oxygen and a gas containing a halogen into plasma in a plasma chamber, and supplying an active species of the halogen in the gas formed plasma to a reaction chamber to strip the organic material in the reaction chamber, wherein one mole or more of water vapor based upon two moles of the halogen molecule is fed to the reaction chamber, and the active species of the halogen are removed before contact thereof with the organic material.

REFERENCES:
patent: 4699689 (1987-10-01), Bersin
patent: 4749440 (1978-01-01), Blackwood et al.
Extended Abstracts "The 49th Autumn Metting, 1988", The Japan Society of Applied Physics, pp. 553-554, and Partial English Translation Thereof.

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