Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-01-04
1991-01-08
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
134 1, 156646, 156655, 156668, 156345, 20419236, 20429838, B44C 122, B29C 3700, C03C 1500, C03C 2506
Patent
active
049832549
ABSTRACT:
A process for stripping an organic material, which comprises forming gases including a gas containing oxygen and a gas containing a halogen into plasma in a plasma chamber, and supplying an active species of the halogen in the gas formed plasma to a reaction chamber to strip the organic material in the reaction chamber, wherein one mole or more of water vapor based upon two moles of the halogen molecule is fed to the reaction chamber, and the active species of the halogen are removed before contact thereof with the organic material.
REFERENCES:
patent: 4699689 (1987-10-01), Bersin
patent: 4749440 (1978-01-01), Blackwood et al.
Extended Abstracts "The 49th Autumn Metting, 1988", The Japan Society of Applied Physics, pp. 553-554, and Partial English Translation Thereof.
Fujimura Shuzo
Hikazutani Ken-ichi
Shinagawa Keisuke
Fujitsu Limited
Powell William A.
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