Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1999-03-30
1999-10-26
Niebling, John F.
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438281, H01L 218234
Patent
active
059727551
ABSTRACT:
An electrostatic protection component and a method for forming the same. The method includes forming a gate consisting of a gate oxide layer and a conducting layer above a semiconductor substrate. Spacers are formed on the peripheral sidewalls of the gate. First heavily doped regions are formed in the semiconductor substrate. A metallic layer is formed covering the semiconductor substrate followed by a heating process. First metal silicide layers are formed above the gate while second metal silicide layers are formed above the first heavily doped regions. A photoresist layer is coated above the semiconductor substrate, exposing the first metal silicide layer and part of the second metal silicide layer adjacent to each side of the gate. An etching operation removes the spacers and part of the conducting layer to expose part of the gate oxide layer surface, so that the gate is ultimately transformed into an I-shaped structure having an upper first metal silicide layer, a middle conducting layer and a lower gate oxide layer. An insulating layer is formed above the semiconductor substrate. Contact window openings are formed in the insulating layer exposing the second metal silicide layer.
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Lindsay Jr. Walter L.
Niebling John F.
United Microelectronics Corp.
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