Process for the production of high purity silicon monocrystals h

Details Process for the production of high purity silicon monocrystals h Process for the production of high purity silicon monocrystals h

1978-10-25

1980-12-16

Bernstein, Hiram H.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG64, C30B 1500

Patent

active

042395852

ABSTRACT:
The invention provides a process according to which the oxygen content in ucible-drawn silicon crystals can be lowered and kept substantially constant throughout the length of the rod. This is achieved in that, after applying the seed crystal to the melt pool, the silicon rod being drawn from the melt pool is initially rotated at a speed from 3 to 6 rev/min and this rotational speed is preferably increased to higher values during the drawing process.

REFERENCES:
patent: 3275417 (1966-09-01), Hunt
patent: 3929557 (1975-12-01), Goodrum
patent: 4040895 (1977-08-01), Patrick
Scheel, IBM Tech. Discl. Bulle., vol. 14, #5, Oct. 1971, p. 1631.

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