Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1988-12-02
1991-11-05
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419216, 20419223, 346140R, C23C 1434
Patent
active
050629379
ABSTRACT:
A process for preparing an ink jet head having a support, an electrothermal transducer provided on the support and having a heat-generating resistor and a pair of electrodes electrically connected to the heat-generating resistor, a first upper layer provided. on the electrothermal transducer, a second upper layer provided on the first upper layer and a liquid path communicated with a discharge opening for discharging liquid and formed on the support so as to correspond to the heat-generating portion of the electrothermal transducer formed between the pair of electrodes comprises the steps of:
REFERENCES:
patent: 4567493 (1986-01-01), Ikeda et al.
patent: 4720716 (1988-01-01), Ideda et al.
patent: 4723129 (1988-02-01), Endo et al.
patent: 4804974 (1989-02-01), Sugata et al.
B. Chapman, Glow Discharge Processes, John Wiley & Sons, New York, 1980, pp. 215-227.
L. I. Maissel, Handbook of Thin Film Technology, McGraw-Hill Book Co., New York, 1970, pp. 13-26 to 13-30.
Canon Kabushiki Kaisha
Leader William T.
Niebling John F.
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