Power transistor with trench sinker for contacting the backside

Details Power transistor with trench sinker for contacting the backside Power transistor with trench sinker for contacting the backside

2008-02-27

2010-06-08

Le, Dung A. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S332000, C257S333000, C438S138000, C438S183000

Reexamination Certificate

active

07732876

ABSTRACT:
A power transistor includes a first semiconductor region of a first conductivity type extending over and in contact with a second semiconductor region of the first conductivity type. Gate trenches extend into the first semiconductor region. Well regions of a second conductivity type extend over the first semiconductor region and between adjacent gate trenches. A sinker trench extends through the first semiconductor region and terminates within the second semiconductor region, and is laterally spaced from an outer one of the gate trenches with no well regions abutting sidewalls of the sinker trench. Source regions of the first conductivity type extend over the well regions. A conductive material in the sinker trench makes electrical contact with the second semiconductor region along the bottom of the sinker trench and with a drain interconnect layer extending along the top of the sinker trench.

REFERENCES:
patent: 3404295 (1968-10-01), Warner et al.
patent: 3412297 (1968-11-01), Amlinger
patent: 3497777 (1970-02-01), Teszner et al.
patent: 3564356 (1971-02-01), Wilson
patent: 3660697 (1972-05-01), Berglund et al.
patent: 4003072 (1977-01-01), Matsushita et al.
patent: 4011105 (1977-03-01), Paivinen et al.
patent: 4300150 (1981-11-01), Colak
patent: 4324038 (1982-04-01), Chang et al.
patent: 4326332 (1982-04-01), Kenney et al.
patent: 4337474 (1982-06-01), Yukimoto
patent: 4338616 (1982-07-01), Bol
patent: 4345265 (1982-08-01), Blanchard
patent: 4445202 (1984-04-01), Goetze et al.
patent: 4568958 (1986-02-01), Baliga
patent: 4579621 (1986-04-01), Hine
patent: 4636281 (1987-01-01), Buiguez et al.
patent: 4638344 (1987-01-01), Cardwell, Jr.
patent: 4639761 (1987-01-01), Singer et al.
patent: 4673962 (1987-06-01), Chatterjee et al.
patent: 4694313 (1987-09-01), Beasom
patent: 4698653 (1987-10-01), Cardwell, Jr.
patent: 4716126 (1987-12-01), Cogan
patent: 4745079 (1988-05-01), Pfiester
patent: 4746630 (1988-05-01), Hui et al.
patent: 4754310 (1988-06-01), Coe
patent: 4767722 (1988-08-01), Blanchard
patent: 4774556 (1988-09-01), Fujii et al.
patent: 4801986 (1989-01-01), Chang et al.
patent: 4821095 (1989-04-01), Temple
patent: 4823176 (1989-04-01), Baliga et al.
patent: 4824793 (1989-04-01), Richardson et al.
patent: 4853345 (1989-08-01), Himelick
patent: 4868624 (1989-09-01), Grung et al.
patent: 4893160 (1990-01-01), Blanchard
patent: 4914058 (1990-04-01), Blanchard
patent: 4941026 (1990-07-01), Temple
patent: 4961100 (1990-10-01), Baliga et al.
patent: 4967245 (1990-10-01), Cogan et al.
patent: 4969028 (1990-11-01), Baliga
patent: 4974059 (1990-11-01), Kinzer
patent: 4990463 (1991-02-01), Mori
patent: 4992390 (1991-02-01), Chang
patent: 5023196 (1991-06-01), Johnsen et al.
patent: 5027180 (1991-06-01), Nishizawa et al.
patent: 5034785 (1991-07-01), Blanchard
patent: 5065273 (1991-11-01), Rajeevakumar
patent: 5071782 (1991-12-01), Mori
patent: 5072266 (1991-12-01), Bulucea
patent: 5079608 (1992-01-01), Wodarczyk et al.
patent: 5105243 (1992-04-01), Nakagawa et al.
patent: 5111253 (1992-05-01), Korman et al.
patent: 5134448 (1992-07-01), Johnsen et al.
patent: 5142640 (1992-08-01), Iwamatsu
patent: 5156989 (1992-10-01), Williams et al.
patent: 5164325 (1992-11-01), Cogan et al.
patent: 5164802 (1992-11-01), Jones et al.
patent: 5168331 (1992-12-01), Yilmaz
patent: 5168973 (1992-12-01), Asayama et al.
patent: 5188973 (1993-02-01), Omura et al.
patent: 5208657 (1993-05-01), Chatterjee et al.
patent: 5216275 (1993-06-01), Chen
patent: 5219777 (1993-06-01), Kang
patent: 5219793 (1993-06-01), Cooper et al.
patent: 5233215 (1993-08-01), Baliga
patent: 5242845 (1993-09-01), Baba et al.
patent: 5250450 (1993-10-01), Lee et al.
patent: 5262336 (1993-11-01), Pike, Jr. et al.
patent: 5268311 (1993-12-01), Euen et al.
patent: 5270257 (1993-12-01), Shin
patent: 5275961 (1994-01-01), Smayling et al.
patent: 5275965 (1994-01-01), Manning
patent: 5281548 (1994-01-01), Prall
patent: 5283201 (1994-02-01), Tsang et al.
patent: 5283452 (1994-02-01), Shih et al.
patent: 5294824 (1994-03-01), Okada
patent: 5298781 (1994-03-01), Cogan et al.
patent: 5300447 (1994-04-01), Anderson
patent: 5300452 (1994-04-01), Chang et al.
patent: 5326711 (1994-07-01), Malhi
patent: 5346834 (1994-09-01), Hisamoto et al.
patent: 5349224 (1994-09-01), Gilbert et al.
patent: 5350937 (1994-09-01), Yamazaki et al.
patent: 5365102 (1994-11-01), Mehrotra et al.
patent: 5366914 (1994-11-01), Takahashi et al.
patent: 5378655 (1995-01-01), Hutchings et al.
patent: 5389815 (1995-02-01), Takahashi
patent: 5405794 (1995-04-01), Kim
patent: 5418376 (1995-05-01), Muraoka et al.
patent: 5424231 (1995-06-01), Yang
patent: 5429977 (1995-07-01), Lu et al.
patent: 5430311 (1995-07-01), Murakami et al.
patent: 5430324 (1995-07-01), Bencuya
patent: 5434435 (1995-07-01), Baliga
patent: 5436189 (1995-07-01), Beasom
patent: 5438007 (1995-08-01), Vinal et al.
patent: 5438215 (1995-08-01), Tihanyi
patent: 5442214 (1995-08-01), Yang
patent: 5473176 (1995-12-01), Kakumoto
patent: 5473180 (1995-12-01), Ludikhuize
patent: 5474943 (1995-12-01), Hshieh et al.
patent: 5488010 (1996-01-01), Wong
patent: 5519245 (1996-05-01), Tokura et al.
patent: 5532179 (1996-07-01), Chang et al.
patent: 5541425 (1996-07-01), Nishihara
patent: 5554552 (1996-09-01), Chi
patent: 5554862 (1996-09-01), Omura et al.
patent: 5567634 (1996-10-01), Hebert et al.
patent: 5567635 (1996-10-01), Acovic et al.
patent: 5572048 (1996-11-01), Sugawara
patent: 5576245 (1996-11-01), Cogan et al.
patent: 5578851 (1996-11-01), Hshieh et al.
patent: 5581100 (1996-12-01), Ajit
patent: 5583060 (1996-12-01), Hertrich et al.
patent: 5583065 (1996-12-01), Miwa
patent: 5589405 (1996-12-01), Contiero et al.
patent: 5592005 (1997-01-01), Floyd et al.
patent: 5593909 (1997-01-01), Han et al.
patent: 5595927 (1997-01-01), Chen et al.
patent: 5597765 (1997-01-01), Yilmaz et al.
patent: 5605852 (1997-02-01), Bencuya
patent: 5614749 (1997-03-01), Ueno
patent: 5616945 (1997-04-01), Williams
patent: 5623152 (1997-04-01), Majumdar et al.
patent: 5629543 (1997-05-01), Hshieh et al.
patent: 5637898 (1997-06-01), Baliga
patent: 5639676 (1997-06-01), Hshieh et al.
patent: 5640034 (1997-06-01), Malhi
patent: 5648283 (1997-07-01), Tsang et al.
patent: 5648670 (1997-07-01), Blanchard
patent: 5656843 (1997-08-01), Goodyear et al.
patent: 5665619 (1997-09-01), Kwan et al.
patent: 5670803 (1997-09-01), Beilstein, Jr. et al.
patent: 5684320 (1997-11-01), Kawashima
patent: 5689128 (1997-11-01), Hshieh et al.
patent: 5693569 (1997-12-01), Ueno
patent: 5705409 (1998-01-01), Witek
patent: 5710072 (1998-01-01), Krautschneider et al.
patent: 5714781 (1998-02-01), Yamamoto et al.
patent: 5717237 (1998-02-01), Chi
patent: 5719409 (1998-02-01), Singh et al.
patent: 5721148 (1998-02-01), Nishimura
patent: 5744372 (1998-04-01), Bulucea
patent: 5767004 (1998-06-01), Balasubramanian et al.
patent: 5770878 (1998-06-01), Beasom
patent: 5776813 (1998-07-01), Huang et al.
patent: 5780343 (1998-07-01), Bashir
patent: 5801082 (1998-09-01), Tseng
patent: 5801417 (1998-09-01), Tsang et al.
patent: 5814858 (1998-09-01), Williams
patent: 5821583 (1998-10-01), Hshieh et al.
patent: 5877528 (1999-03-01), So
patent: 5879971 (1999-03-01), Witek
patent: 5879994 (1999-03-01), Kwan et al.
patent: 5891776 (1999-04-01), Han et al.
patent: 5894157 (1999-04-01), Han et al.
patent: 5895951 (1999-04-01), So et al.
patent: 5895952 (1999-04-01), Darwish et al.
patent: 5897343 (1999-04-01), Mathew et al.
patent: 5897360 (1999-04-01), Kawaguchi
patent: 5900663 (1999-05-01), Johnson et al.
patent: 5906680 (1999-05-01), Meyerson
patent: 5907776 (1999-05-01), Hshieh et al.
patent: 5917216 (1999-06-01), Floyd et al.
patent: 5929481 (1999-07-01), Hshieh et al.
patent: 5943581 (1999-08-01), Lu et al.
patent: 5945708 (1999-08-01), Tihanyi
patent: 5949104 (1999-09-01), D'Anna et al.
patent: 5949124 (1999-09-01), Hadizad et al.
patent: 5959324 (1999-09-01), Kohyama
patent: 5960271 (1999-09-01), Wollesen et al.
patent: 5960311 (1999-09-01), Singh et al.
patent: 5972741 (1999-10-01), Kubo et al.
patent: 5973360 (1999-10-01), Tihanyi
patent: 5973367 (1999-10-01), Willi

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