Semiconductor device having a laterally modulated gate...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S585000, C438S586000, C438S595000, C438S596000

Reexamination Certificate

active

07666727

ABSTRACT:
A transistor comprising a gate electrode formed on a gate dielectric layer formed on a substrate. A pair of source/drain regions are formed in the substrate on opposite sides of the laterally opposite sidewalls of the gate electrode. The gate electrode has a central portion formed on the gate dielectric layer and over the substrate region between the source and drain regions and a pair sidewall portions which overlap a portion of the source/drain regions wherein the central portion has a first work function and said pair of sidewall portions has a second work function, wherein the second work function is different than the first work function.

REFERENCES:
patent: 4599790 (1986-07-01), Kim et al.
patent: 6096641 (2000-08-01), Kunikiyo
patent: 6225669 (2001-05-01), Long et al.
patent: 6300177 (2001-10-01), Sundaresan et al.
patent: 6312995 (2001-11-01), Yu
patent: 6586808 (2003-07-01), Xiang et al.
patent: 6630720 (2003-10-01), Maszara et al.
patent: 6737309 (2004-05-01), Matsuo
patent: 6744101 (2004-06-01), Long et al.
patent: 6875693 (2005-04-01), May et al.
patent: 6878579 (2005-04-01), Ohuchi et al.
patent: 6894353 (2005-05-01), Samavedam et al.
patent: 2003/0129818 (2003-07-01), Inai et al.
patent: 2003/0132466 (2003-07-01), Shin et al.
patent: 2003/0153139 (2003-08-01), Ang et al.
patent: 2004/0212035 (2004-10-01), Yeo et al.
patent: 2005/0110098 (2005-05-01), Yoshihara
patent: 2006/0244079 (2006-11-01), Wang et al.
patent: 0 856 892 (1998-08-01), None
patent: 62073668 (1987-04-01), None
patent: 05226361 (1993-09-01), None
patent: 05243564 (1993-09-01), None
patent: WO 00/77828 (2000-12-01), None
patent: WO 0077828 (2000-12-01), None
patent: WO 03/079444 (2003-03-01), None
International Searching Authority Report (ISR) PCT/US05/010506 and Written Opinion of ISA mailed Nov. 30, 2005.
Anonymous, “MOS Transistor with Engineered Metal Electrodes, Including Fabrication Process,” Research Disclosure, Kenneth Mason Publications, Westbourne GB, vol. 438, No. 1, Oct. 2000.
Frohlich K., et al., “Ru and RuO2 gate electrodes for advanced CMOS technology,” Materials Science and Engineering B, Elsevier Sequoia, Lausanne, CH, vol. 109, No. 1-3, Mar. 5, 2004, pp. 117-121.
Lander R. J. P., et al., “A Tuneable Metal Gate Work Function Using Solid State Diffusion of Nitrogen,” Proceedings of the 32nd European Solid-State Device Research Conference, Univ. of Bologna, Bologna, Italy, 2002, pp. 103-106.
Lin R., et al., “An Adjustable Work Function Technology Using Mo Gate for CMOS Devices,” IEEE Electron Device Letters, IEEE, Inc., New York, vol. 23, No. 1, Jan. 2002, pp. 49-51.
Office Action from U.S. Appl. No. 10/816,232 mailed Oct. 11, 2006, 6 pgs.
International Preliminary Report on Patentability and Written Opinion from PCT/US2005/010506 mailed Oct. 12, 2006, 10 pgs.
Final Office Action from U.S. Appl. No. 10/816,232 mailed Apr. 5, 2007, 7 pgs.
First Office Action from Chinese Patent Application No. 200580010856.6 mailed Jun. 27, 2008, 12 pgs.
Examination Report from German Patent Application No. 11 2005 000 729.4-33 mailed Aug. 1, 2008, 3 pgs.
Notice of Preliminary Rejection from Korean Patent Application No. 2006-7020198 mailed Sep. 22, 2007, 3 pgs.
Official Notification from Taiwan Patent Application No. 94110096 mailed Feb. 17, 2006, 2 pgs.
“First Office Action”, State Intellectual Property Office, P.R. China, Chinese Patent Application No. 200580010856.6; (Jun. 27, 2008).

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