Trench gate type semiconductor device

Details Trench gate type semiconductor device Trench gate type semiconductor device

2006-04-06

2010-02-23

Parker, Kenneth A (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S330000, C257S332000, C257SE29201

Reexamination Certificate

active

07667269

ABSTRACT:
A semiconductor device includes: a first semiconductor layer; a second semiconductor layer on the first semiconductor layer; a third semiconductor layer on the second semiconductor layer; a fourth semiconductor layer in a part of the third semiconductor layer; a trench penetrating the fourth semiconductor layer and the third semiconductor layer and reaching the second semiconductor layer; a gate insulation film on an inner wall of the trench; a gate electrode on the gate insulation film in the trench; a first electrode; and a second electrode. The trench includes a bottom with a curved surface having a curvature radius equal to or smaller than 0.5 μm.

REFERENCES:
patent: 5321289 (1994-06-01), Baba et al.
patent: 6060747 (2000-05-01), Okumura et al.
patent: 6482701 (2002-11-01), Ishikawa et al.
patent: 6661053 (2003-12-01), Willer et al.
patent: 6737705 (2004-05-01), Momota et al.
patent: 7061047 (2006-06-01), Ono et al.
patent: 7151297 (2006-12-01), Wakimoto et al.
patent: 2006/0138535 (2006-06-01), Ono et al.
Office Action dated Mar. 14, 2008 in corresponding Chinese Patent Application No. 200610077712.9 (and English translation).

Affiliated with

Also associated with

Rating

Trench gate type semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Trench gate type semiconductor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Trench gate type semiconductor device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4164461