Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-06-23
2010-10-19
Hamilton, Cynthia (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C438S952000, C438S636000, C430S311000, C430S511000, C430S522000, C525S057000, C525S199000, C525S107000, C525S108000, C525S109000
Reexamination Certificate
active
07816069
ABSTRACT:
An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer.
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Brodsky Colin J.
Burns Sean D.
Goldfarb Dario L.
Lercel Michael
Medeiros David R.
Connolly Bove & Lodge & Hutz LLP
Hamilton Cynthia
International Business Machines - Corporation
Morris Daniel P.
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