Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2002-07-08
2010-12-07
Vu, Hung (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S314000, C257S324000, C257S331000
Reexamination Certificate
active
07847344
ABSTRACT:
Structures, systems and methods for transistors utilizing oxide-nitride nanolaminates are provided. One transistor embodiment includes a first source/drain region, a second source/drain region, and a channel region therebetween. A gate is separated from the channel region by a gate insulator. The gate insulator includes oxide-nitride nanolaminate layers to trap charge in potential wells formed by different electron affinities of the oxide-nitride nanolaminate layers.
REFERENCES:
patent: 3665423 (1972-05-01), Nakamuma et al.
patent: 3877054 (1975-04-01), Boulin et al.
patent: 3964085 (1976-06-01), Kahng et al.
patent: 4173791 (1979-11-01), Bell
patent: 4217601 (1980-08-01), DeKeersmaecker et al.
patent: 4507673 (1985-03-01), Aoyama et al.
patent: 4661833 (1987-04-01), Mizutani
patent: 4939559 (1990-07-01), DiMaria et al.
patent: 5016215 (1991-05-01), Tigelaar
patent: 5017977 (1991-05-01), Richardson
patent: 5021999 (1991-06-01), Kohda et al.
patent: 5027171 (1991-06-01), Reedy et al.
patent: 5111430 (1992-05-01), Morie
patent: 5253196 (1993-10-01), Shimabukuro
patent: 5274249 (1993-12-01), Xi et al.
patent: 5293560 (1994-03-01), Harari
patent: 5298447 (1994-03-01), Hong
patent: 5303182 (1994-04-01), Nakao et al.
patent: 5317535 (1994-05-01), Talreja et al.
patent: 5388069 (1995-02-01), Kokubo
patent: 5409859 (1995-04-01), Glass et al.
patent: 5424993 (1995-06-01), Lee et al.
patent: 5430670 (1995-07-01), Rosenthal
patent: 5434815 (1995-07-01), Smarandoiu et al.
patent: 5438544 (1995-08-01), Makino
patent: 5449941 (1995-09-01), Yamazaki et al.
patent: 5467306 (1995-11-01), Kaya et al.
patent: 5477485 (1995-12-01), Bergemont et al.
patent: 5485422 (1996-01-01), Bauer et al.
patent: 5493140 (1996-02-01), Iguchi
patent: 5508543 (1996-04-01), Hartstein et al.
patent: 5508544 (1996-04-01), Shah
patent: 5530581 (1996-06-01), Cogan
patent: 5602777 (1997-02-01), Nawaki et al.
patent: 5627781 (1997-05-01), Hayashi et al.
patent: 5670790 (1997-09-01), Katoh et al.
patent: 5677867 (1997-10-01), Hazani
patent: 5698022 (1997-12-01), Glassman et al.
patent: 5714766 (1998-02-01), Chen et al.
patent: 5754477 (1998-05-01), Forbes
patent: 5768192 (1998-06-01), Eitan
patent: 5795808 (1998-08-01), Park
patent: 5801401 (1998-09-01), Forbes
patent: 5828605 (1998-10-01), Peng et al.
patent: 5852306 (1998-12-01), Forbes
patent: 5886368 (1999-03-01), Forbes et al.
patent: 5912488 (1999-06-01), Kim et al.
patent: 5916365 (1999-06-01), Sherman
patent: 5936274 (1999-08-01), Forbes et al.
patent: 5943262 (1999-08-01), Choi
patent: 5959896 (1999-09-01), Forbes
patent: 5989958 (1999-11-01), Forbes
patent: 5991225 (1999-11-01), Forbes et al.
patent: 6005790 (1999-12-01), Chan et al.
patent: 6011725 (2000-01-01), Eitan
patent: 6013553 (2000-01-01), Wallace et al.
patent: 6020024 (2000-02-01), Maiti et al.
patent: 6027961 (2000-02-01), Maiti et al.
patent: 6031263 (2000-02-01), Forbes et al.
patent: 6049479 (2000-04-01), Thurgate et al.
patent: 6072209 (2000-06-01), Noble et al.
patent: 6110529 (2000-08-01), Gardiner et al.
patent: 6115281 (2000-09-01), Aggarwal et al.
patent: 6122201 (2000-09-01), Lee et al.
patent: 6150687 (2000-11-01), Noble et al.
patent: 6160739 (2000-12-01), Wong
patent: 6166401 (2000-12-01), Forbes
patent: 6171900 (2001-01-01), Sun
patent: 6194228 (2001-02-01), Fujiki et al.
patent: 6203613 (2001-03-01), Gates et al.
patent: 6222768 (2001-04-01), Hollmer et al.
patent: 6225168 (2001-05-01), Gardner et al.
patent: 6232643 (2001-05-01), Forbes et al.
patent: 6243300 (2001-06-01), Sunkavalli
patent: 6246606 (2001-06-01), Forbes et al.
patent: 6249020 (2001-06-01), Forbes et al.
patent: 6255683 (2001-07-01), Radens et al.
patent: 6269023 (2001-07-01), Derhacobian et al.
patent: 6294813 (2001-09-01), Forbes et al.
patent: 6297539 (2001-10-01), Ma et al.
patent: 6303481 (2001-10-01), Park
patent: 6313518 (2001-11-01), Ahn et al.
patent: 6320784 (2001-11-01), Muralidhar et al.
patent: 6320786 (2001-11-01), Chang et al.
patent: 6351411 (2002-02-01), Forbes et al.
patent: 6353554 (2002-03-01), Banks
patent: 6365470 (2002-04-01), Maeda
patent: 6380579 (2002-04-01), Nam et al.
patent: 6407435 (2002-06-01), Ma et al.
patent: 6429063 (2002-08-01), Eitan
patent: 6432779 (2002-08-01), Hobbs et al.
patent: 6438031 (2002-08-01), Fastow
patent: 6445030 (2002-09-01), Wu et al.
patent: 6449188 (2002-09-01), Fastow
patent: 6456531 (2002-09-01), Wang et al.
patent: 6456536 (2002-09-01), Sobek et al.
patent: 6459618 (2002-10-01), Wang
patent: 6465306 (2002-10-01), Ramsbey et al.
patent: 6487121 (2002-11-01), Thurgate et al.
patent: 6490204 (2002-12-01), Bloom et al.
patent: 6490205 (2002-12-01), Wang et al.
patent: 6504755 (2003-01-01), Katayama et al.
patent: 6521950 (2003-02-01), Shimabukuro et al.
patent: 6521958 (2003-02-01), Forbes et al.
patent: 6525969 (2003-02-01), Kurihara et al.
patent: 6541816 (2003-04-01), Ramsbey et al.
patent: 6545314 (2003-04-01), Forbes et al.
patent: 6552387 (2003-04-01), Eitan
patent: 6559014 (2003-05-01), Jeon
patent: 6566699 (2003-05-01), Eitan
patent: 6567303 (2003-05-01), Hamilton et al.
patent: 6567312 (2003-05-01), Torii et al.
patent: 6570787 (2003-05-01), Wang et al.
patent: 6580118 (2003-06-01), Ludwig et al.
patent: 6580124 (2003-06-01), Cleeves et al.
patent: 6618290 (2003-09-01), Wang et al.
patent: 6630381 (2003-10-01), Hazani
patent: 6642573 (2003-11-01), Halliyal et al.
patent: 6674138 (2004-01-01), Halliyal et al.
patent: 6714455 (2004-03-01), Banks
patent: 6873539 (2005-03-01), Fazan et al.
patent: 6996009 (2006-02-01), Forbes
patent: 7045430 (2006-05-01), Ahn et al.
patent: 7154140 (2006-12-01), Forbes
patent: 7166509 (2007-01-01), Forbes
patent: 7193893 (2007-03-01), Forbes
patent: 7221017 (2007-05-01), Forbes et al.
patent: 7221586 (2007-05-01), Forbes et al.
patent: 7348237 (2008-03-01), Forbes
patent: 7369435 (2008-05-01), Forbes
patent: 7433237 (2008-10-01), Forbes et al.
patent: 7476586 (2009-01-01), Forbes
patent: 7489545 (2009-02-01), Forbes et al.
patent: 7494873 (2009-02-01), Forbes et al.
patent: 2002/0003252 (2002-01-01), Iyer
patent: 2002/0027264 (2002-03-01), Forbes et al.
patent: 2002/0036939 (2002-03-01), Tsai et al.
patent: 2002/0074565 (2002-06-01), Flagan et al.
patent: 2002/0089023 (2002-07-01), Yu et al.
patent: 2002/0192974 (2002-12-01), Ahn et al.
patent: 2003/0032270 (2003-02-01), Snyder et al.
patent: 2003/0235077 (2003-12-01), Forbes
patent: 2003/0235081 (2003-12-01), Forbes
patent: 2003/0235085 (2003-12-01), Forbes
patent: 2004/0063276 (2004-04-01), Yamamoto et al.
patent: 2005/0023574 (2005-02-01), Forbes et al.
patent: 2005/0026375 (2005-02-01), Forbes
patent: 2005/0036370 (2005-02-01), Forbes
patent: 2005/0082599 (2005-04-01), Forbes
patent: 2005/0085040 (2005-04-01), Forbes
patent: 2006/0001080 (2006-01-01), Forbes
patent: 2006/0002188 (2006-01-01), Forbes
patent: 2006/0008966 (2006-01-01), Forbes et al.
patent: 2006/0258097 (2006-11-01), Forbes et al.
patent: 2006/0261376 (2006-11-01), Forbes et al.
patent: 2006/0284246 (2006-12-01), Forbes et al.
patent: 2007/0015331 (2007-01-01), Forbes
patent: 2007/0178643 (2007-08-01), Forbes et al.
patent: 2009/0002025 (2009-01-01), Forbes et al.
patent: 03-222367 (1991-10-01), None
patent: 06-224431 (1994-08-01), None
patent: 06-302828 (1994-10-01), None
patent: 08-255878 (1996-10-01), None
Abbas, S. A., et al., “N-Channel Igfet Design Limitations Due to Hot Electron Trapping”,Technical Digest, International Electron Devices Meeting., Washington, DC,(Dec. 1975), pp. 35-38.
Adelmann, C , et al., “Atomic-layer epitaxy of GaN quantum wells and quantum dots on (0001) AIN”,Journal of Applied Physics, vol. 91, No. 8,(Apr. 15, 2002),pp. 5498-5500.
Ahn, Seong-Deok , et al., “Surface Morphology Improvement of Metalorganic Chemical Vapor Deposition AI Films by Layered Deposition of AI and Ultrathin TiN”,Jpn. J. Appl. Phys.vol. 39 (2000) 3349-3354, (Jun. 2000), pp. 3349-3354.
Akasaki, I. , “Effects of AIN Buffer Layer on Crystallographic Structure and on Electrical and Optical Properties of GaN and Ga(1-x)AI(x)N [0< x (< or =) 0.4] Films Gr
Ahn Kie Y.
Forbes Leonard
Micro)n Technology, Inc.
Schwegman Lundberg & Woessner, P.A.
Vu Hung
LandOfFree
Memory utilizing oxide-nitride nanolaminates does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Memory utilizing oxide-nitride nanolaminates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Memory utilizing oxide-nitride nanolaminates will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4153259