Lateral-moving micromachined thermal bimorph and method for...

Details Lateral-moving micromachined thermal bimorph and method for... Lateral-moving micromachined thermal bimorph and method for...

2005-06-10

2009-12-08

Wilson, Allan R. (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Temperature

C257SE29347

Reexamination Certificate

active

07629664

ABSTRACT:
The Lateral-Moving Micromachined Thermal Bimorph provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication of a lateral bimorph in a fundamentally planar set of processes. In addition, the invention incorporates special design features that allow the bimorph to maintain material interfaces.

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