4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal

Morgan Research Corporation

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Embeddable polarimetric fiber optic sensor and method for...

Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer
Reexamination Certificate

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Lateral-moving micromachined thermal bimorph and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Temperature
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MEMS sensor suite on a chip

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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MEMS sensor suite on a chip

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Resettable latching MEMS shock sensor apparatus and method

Measuring and testing – Testing by impact or shock
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