4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal

Robert Faye Elliott

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Lateral-moving micromachined thermal bimorph and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Temperature
Reexamination Certificate

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MEMS sensor suite on a chip

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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MEMS sensor suite on a chip

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2379782

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