Transistors having a channel region between channel-portion...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S331000, C257S332000, C257S333000, C257S334000

Reexamination Certificate

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07492004

ABSTRACT:
According to some embodiments of the invention, transistors have channel regions between channel-portion holes. Methods of forming the same include at least two channel-portion holes disposed in a semiconductor substrate. Line patterns are formed in parallel to be spaced apart from each other on a main surface of the semiconductor substrate to fill the channel-portion holes. A channel region is disposed in the semiconductor substrate below the line patterns. At this time, the channel region is formed between the channel-portion holes and also covers lower portions of the channel-portion holes. Driving current capability and refresh characteristics of DRAMs utilizing the inventive transistors are improved.

REFERENCES:
patent: 5817558 (1998-10-01), Wu
patent: 5945708 (1999-08-01), Tihanyi
patent: 6124608 (2000-09-01), Liu et al.
patent: 2001/0003367 (2001-06-01), Hshieh et al.
patent: 2001/0054734 (2001-12-01), Koth et al.
patent: 2003/0205740 (2003-11-01), Ahn
patent: 2004/0094799 (2004-05-01), Nakamura
patent: 2004/0119103 (2004-06-01), Thapar
patent: 06-224429 (1994-12-01), None
English language abstract of Japanese Publication No. 06-224429.

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