Foreign matter or abnormal unsmoothness inspection apparatus...

Details Foreign matter or abnormal unsmoothness inspection apparatus... Foreign matter or abnormal unsmoothness inspection apparatus...

2008-02-25

2009-12-08

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S282000, C250S281000, C073S001010, C073S081000, C073S083000, C073S105000, C073S862638, C428S408000, C204S192150

Reexamination Certificate

active

07629577

ABSTRACT:
A foreign matter or abnormal unsmoothness inspection apparatus is constituted by a detecting member for detecting a foreign matter or abnormal unsmoothness by measuring smoothness of a surface of a substrate-like measuring object, a marking device for providing an dent on the surface of the measuring object with a predetermined horizontal distance from the foreign matter or abnormal unsmoothness, and a mass spectrum measuring device for measuring a mass spectrum of secondary ion emitted from a position with a predetermined distance from the dent by detecting the dent through impact and scanning of the surface of the measuring object with a primary ion beam.

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patent: 11-23481 (1999-01-01), None
patent: 2004-107192 (2004-04-01), None

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