Method for making conductive nanoparticle charge storage...

Details Method for making conductive nanoparticle charge storage... Method for making conductive nanoparticle charge storage...

2005-08-04

2009-08-18

Menz, Douglas M (Department: 2891)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S260000, C438S261000, C438S964000, C977S943000

Reexamination Certificate

active

07575978

ABSTRACT:
Isolated conductive nanoparticles on a dielectric layer and methods of fabricating such isolated conductive nanoparticles provide charge storage units in electronic structures for use in a wide range of electronic devices and systems. The isolated conductive nanoparticles may be used as a floating gate in a flash memory. In an embodiment, conductive nanoparticles are deposited on a dielectric layer by a plasma-assisted deposition process such that each conductive nanoparticle is isolated from the other conductive nanoparticles to configure the conductive nanoparticles as charge storage elements.

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