Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-09-21
2008-08-26
Everhart, Caridad M (Department: 2891)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S677000, C257SE21586, C257SE21479
Reexamination Certificate
active
07416975
ABSTRACT:
A method is provided for manufacturing removable contact structures on the surface of a substrate to conduct electricity from a contact member to the surface during electroprocessing. The method comprises forming a conductive layer on the surface. A predetermined region of the conductive layer is selectively coated by a contact layer so that the contact member touches the contact layer as the electroprocessing is performed on the conductive layer.
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Basol Bulent M.
Talieh Homayoun
Uzoh Cyprian E.
Wang Hung-Ming
Everhart Caridad M
Knobbe Martens Olson & Bear LLP
Novellus Systems Inc.
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