Methods of fabricating a membrane with improved mechanical...

Details Methods of fabricating a membrane with improved mechanical... Methods of fabricating a membrane with improved mechanical...

2001-02-12

2008-10-14

Malsawma, Lex (Department: 2892)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

Reexamination Certificate

active

07435613

ABSTRACT:
Methods for fabricating robust films across a patterned underlying layer's edges or steps are disclosed. The novel methods diminish the negative effects of electrode steps or edges on the integrity of a membrane. Thus, the methods are particularly applicable to membrane release technology. The height of the step or edge is eliminated or reduced to increase the mechanical integrity of the film.

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