4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Linus Albert Fetter

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Method and apparatus for thickness control and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of deposition of films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of isolation for acoustic resonator device

Metal working – Piezoelectric device making
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Method of manufacturing and mounting electronic devices to...

Metal working – Piezoelectric device making
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Method of tuning thin film resonator filters by removing or...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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Profile ID: LFUS-PAI-P-2129816

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