Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2006-03-16
2008-08-12
Meeks, Timothy (Department: 1792)
Coating processes
Coating by vapor, gas, or smoke
C427S255700
Reexamination Certificate
active
07410670
ABSTRACT:
The invention relates to a method and device for depositing at least one layer on at least one substrate in a process chamber. Said layer comprises several components and is insulating, passivating or electrically conductive. The components are vaporized in a tempered vaporization chamber by means of non-continuous injection of a liquid starting material or a starting material dissolved in a liquid using a respective injector unit. Said vapor is guided to the process chamber by means of a carrier gas. It is important to individually adjust or vary the material flow parameters, such as injection frequency and the pulse/pause ratio and the phase relation of the pulse/pauses to the pulse/pauses of the other injector unit, determining the time response of the flow of material through each injector unit. The pressure in the process chamber is less than 100 mbars, the process chamber is tempered and several series of layers are deposited on the substrate during one process step.
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PCT International Search Report, Mar. 30, 2005, 3 pages.
Baumann Peter
Deschler Marc
Lindner Johannes
Schumacher Marcus
Aixtron AG
Burkhart Elizabeth A
Meeks Timothy
St. Onge Steward Johnston & Reens LLC
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