4. Chemistry of inorganic compounds
  5. Silicon or compound thereof
  6. Oxygen containing

Marcus Schumacher

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Device and method for depositing one or more layers on a...

Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing
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Process and apparatus for depositing single-component or...

Coating processes – Coating by vapor – gas – or smoke
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Process for depositing layers containing silicon and germanium

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from liquid combined with subsequent diverse...
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Profile ID: LFUS-PAI-P-2869993

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