Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-12-15
2008-10-28
Decady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S121000, C365S042000, C438S689000, C707S793000, C702S170000
Reexamination Certificate
active
07444198
ABSTRACT:
A method of determining a physical property of a substrate includes recording a first spectrum obtained from a substrate, the first spectrum being obtained during a polishing process that alters a physical property of the substrate. The method includes identifying, in a database, at least one of several previously recorded spectra that is similar to the recorded first spectrum. Each of the spectra in the database has a physical property value associated therewith. The method includes generating a signal indicating that a first value of the physical property is associated with the first spectrum, the first value being determined using the physical property value associated with the identified previously recorded spectrum in the database. A system for determining a physical property of a substrate includes a polishing machine, an endpoint determining module, and a database.
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Benvegnu Dominic J.
Carlsson Ingemar
David Jeffrey Drue
Karuppiah Lakshmanan
Lee Harry Q.
Applied Materials Inc.
De'cady Albert
Fish & Richardson
Lee Douglas S
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