Solution deposition of chalcogenide films containing...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S095000, C438S197000, C438S590000, C438S602000

Reexamination Certificate

active

07341917

ABSTRACT:
Metal chalcogenide films comprising at least one transition metal chalcogenide are prepared by dissolving a metal chalcogenide containing at least one transition metal chalcogenide in a hydrazine compound and, optionally, an excess of chalcogen to provide a precursor of the metal chalcogenide; applying a solution of said precursor onto a substrate to produce a film of said precursor; and annealing the film of the precursor to produce the metal chalcogenide film comprising at least one transition metal chalcogenide. The process can be used to prepare field-effect transistors and photovoltaic devices.

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