Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2008-07-29
2008-07-29
Nguyen, Tuan H (Department: 2813)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S301000, C438S306000
Reexamination Certificate
active
11435079
ABSTRACT:
A method of monolithically fabricating a lateral double-diffused MOSFET (LDMOS) transistor having a source, drain, and a gate on a substrate, with a process flow that is compatible with a CMOS process flow, is disclosed.
REFERENCES:
patent: 4769686 (1988-09-01), Horiuchi et al.
patent: 5237193 (1993-08-01), Williams et al.
patent: 5275961 (1994-01-01), Smayling et al.
patent: 5349225 (1994-09-01), Redwine et al.
patent: 5430403 (1995-07-01), Moyer et al.
patent: 5610421 (1997-03-01), Contiero et al.
patent: 5648288 (1997-07-01), Williams et al.
patent: 5789785 (1998-08-01), Ravanelli et al.
patent: 5834851 (1998-11-01), Ikeda et al.
patent: 5955746 (1999-09-01), Kim
patent: 5998274 (1999-12-01), Akram et al.
patent: 6022770 (2000-02-01), Hook et al.
patent: 6078082 (2000-06-01), Bulucea
patent: 6142375 (2000-11-01), Belka et al.
patent: 6160289 (2000-12-01), Kwon et al.
patent: 6252278 (2001-06-01), Hsing
patent: 6384643 (2002-05-01), Grose et al.
patent: 6399468 (2002-06-01), Nishibe et al.
patent: 6400126 (2002-06-01), Zuniga et al.
patent: 6441431 (2002-08-01), Efland et al.
patent: 6489209 (2002-12-01), Shimoji et al.
patent: 6518835 (2003-02-01), Ribo et al.
patent: 6538288 (2003-03-01), Lee et al.
patent: 6563175 (2003-05-01), Shiau et al.
patent: 6605844 (2003-08-01), Nakamura et al.
patent: 6642697 (2003-11-01), Zuniga et al.
patent: 6831332 (2004-12-01), D'Anna et al.
patent: 6855985 (2005-02-01), Williams et al.
patent: 6897525 (2005-05-01), Kikuchi et al.
patent: 6911694 (2005-06-01), Negoro et al.
patent: 6927453 (2005-08-01), Shibib et al.
patent: 7005703 (2006-02-01), Shibib et al.
patent: 7038274 (2006-05-01), You et al.
patent: 7074659 (2006-07-01), Zuniga et al.
patent: 7163856 (2007-01-01), You et al.
patent: 7220633 (2007-05-01), You et al.
patent: 2001/0009790 (2001-07-01), Hsing
patent: 2001/0020731 (2001-09-01), Takamura
patent: 2002/0009790 (2002-01-01), Christensen et al.
patent: 2002/0011626 (2002-01-01), Croce et al.
patent: 2002/0030238 (2002-03-01), Nakamura et al.
patent: 2002/0079514 (2002-06-01), Hower et al.
patent: 2002/0089790 (2002-07-01), Stoebe et al.
patent: 2002/0106860 (2002-08-01), Nishibe et al.
patent: 2003/0122160 (2003-07-01), Houston et al.
patent: 2003/0141559 (2003-07-01), Moscatelli et al.
patent: 2004/0046226 (2004-03-01), Himi et al.
patent: 2004/0180485 (2004-09-01), Beasom
patent: 2004/0238913 (2004-12-01), Kwon et al.
patent: 2005/0006701 (2005-01-01), Sung et al.
patent: 2005/0106791 (2005-05-01), You et al.
patent: 2005/0106825 (2005-05-01), You et al.
patent: 2007/0111457 (2007-05-01), You et al.
patent: 2007/0166896 (2007-07-01), You et al.
U.S. Appl. No. 11/232,516, filed Sep. 21, 2005, Budong You et al.
U.S. Appl. No. 11/031,381, filed Jan. 7, 2005, Marco A. Zuniga et al.
S. Wolf, “Silicon Processing for the VLSI Era”, vol. 2—Process Integration, p. 662; Lattice Press, Sunset Beach, California 90742 (ISBN: 0-961672-4-5) (1990).
S. Wolf, “Silicon Processing in the VLSI Era”, vol. 3—The Submicro MOSFET, pp. 591-593, Lattice Press, Sunset Beach, California (1995).
Webster's Collegiate Dictionary, I0th Edition, Springfield, Massachusetts (1999), p. 222.
You Budong
Zuniga Marco A.
Nguyen Tuan H
Volterra Semiconductor Corporation
LandOfFree
Method of fabricating a lateral double-diffused MOSFET... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of fabricating a lateral double-diffused MOSFET..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating a lateral double-diffused MOSFET... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3947012