Methods of forming pluralities of capacitors

Details Methods of forming pluralities of capacitors Methods of forming pluralities of capacitors

2008-07-01

2008-07-01

Lee, Hsien-ming (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S253000, C438S387000, C438S396000

Reexamination Certificate

active

11704512

ABSTRACT:
The invention comprises methods of forming pluralities of capacitors. In one implementation, metal is formed over individual capacitor storage node locations on a substrate. A patterned masking layer is formed over the metal. The patterned masking layer comprises openings therethrough to an outer surface of the metal. Individual of the openings are received over individual of the capacitor storage node locations. A pit is formed in the metal outer surface within individual of the openings. After forming the pits, the metal is anodically oxidized through the openings effective to form a single metal oxide-lined channel in individual of the openings over the individual capacitor storage nodes. Individual capacitor electrodes are formed within the channels in electrical connection with the individual capacitor storage node locations. At least some of the metal oxide is removed from the substrate, and the individual capacitor electrodes are incorporated into a plurality of capacitors. Other aspects and implementations are contemplated.

REFERENCES:
patent: 4517729 (1985-05-01), Batra
patent: 5236860 (1993-08-01), Fazan et al.
patent: 5340763 (1994-08-01), Dennison
patent: 5401681 (1995-03-01), Dennison et al.
patent: 5467305 (1995-11-01), Bertin et al.
patent: 5498562 (1996-03-01), Dennison et al.
patent: 5532089 (1996-07-01), Adair et al.
patent: 5604696 (1997-02-01), Takaishi
patent: 5605857 (1997-02-01), Jost et al.
patent: 5652164 (1997-07-01), Dennison et al.
patent: 5654222 (1997-08-01), Sandhu et al.
patent: 5686747 (1997-11-01), Jost et al.
patent: 5702990 (1997-12-01), Jost et al.
patent: 5705838 (1998-01-01), Jost et al.
patent: 5767561 (1998-06-01), Frei et al.
patent: 5821140 (1998-10-01), Jost et al.
patent: 5869382 (1999-02-01), Kubota
patent: 5900660 (1999-05-01), Jost et al.
patent: 5955758 (1999-09-01), Sandhu et al.
patent: 5981350 (1999-11-01), Geusic et al.
patent: 5990021 (1999-11-01), Prall et al.
patent: 6037212 (2000-03-01), Chao
patent: 6037218 (2000-03-01), Dennison et al.
patent: 6059553 (2000-05-01), Jin et al.
patent: 6090700 (2000-07-01), Tseng
patent: 6108191 (2000-08-01), Bruchhaus et al.
patent: 6110774 (2000-08-01), Jost et al.
patent: 6133620 (2000-10-01), Uochi
patent: 6180450 (2001-01-01), Dennison
patent: 6204143 (2001-03-01), Roberts et al.
patent: 6204178 (2001-03-01), Marsh
patent: 6258650 (2001-07-01), Sunouchi
patent: 6274497 (2001-08-01), Lou
patent: 6303518 (2001-10-01), Tian et al.
patent: 6303956 (2001-10-01), Sandhu et al.
patent: 6323528 (2001-11-01), Yamazaki et al.
patent: 6331461 (2001-12-01), Juengling
patent: 6372554 (2002-04-01), Kawakita et al.
patent: 6383861 (2002-05-01), Gonzalez et al.
patent: 6399490 (2002-06-01), Jammy et al.
patent: 6403442 (2002-06-01), Reinberg
patent: 6432472 (2002-08-01), Farrell et al.
patent: 6458653 (2002-10-01), Jang
patent: 6458925 (2002-10-01), Fasano
patent: 6459138 (2002-10-01), Reinberg
patent: 6617222 (2003-09-01), Coursey
patent: 6645869 (2003-11-01), Chu et al.
patent: 6656748 (2003-12-01), Hall et al.
patent: 6667502 (2003-12-01), Agarwal et al.
patent: 6673693 (2004-01-01), Kirchhoff
patent: 6709978 (2004-03-01), Geusic et al.
patent: 6720232 (2004-04-01), Tu et al.
patent: 6767789 (2004-07-01), Bronner et al.
patent: 6784112 (2004-08-01), Arita et al.
patent: 6812513 (2004-11-01), Geusic et al.
patent: 6822261 (2004-11-01), Yamazaki et al.
patent: 6844230 (2005-01-01), Reinberg
patent: 6849496 (2005-02-01), Jaiprakash et al.
patent: 6897109 (2005-05-01), Jin et al.
patent: 6927122 (2005-08-01), Geusic et al.
patent: 6930640 (2005-08-01), Chung et al.
patent: 7042040 (2006-05-01), Horiguchi
patent: 7064365 (2006-06-01), An et al.
patent: 7073969 (2006-07-01), Kamm
patent: 7074669 (2006-07-01), Iijima et al.
patent: 7081384 (2006-07-01), Birner et al.
patent: 7084451 (2006-08-01), Forbes et al.
patent: 7125781 (2006-10-01), Manning et al.
patent: 7160788 (2007-01-01), Sandhu et al.
patent: 7179706 (2007-02-01), Patraw et al.
patent: 7199005 (2007-04-01), Sandhu et al.
patent: 7202127 (2007-04-01), Busch et al.
patent: 2001/0012223 (2001-08-01), Kohyama
patent: 2001/0026974 (2001-10-01), Reinberg
patent: 2001/0044181 (2001-11-01), Nakamura
patent: 2002/0022339 (2002-02-01), Kirchhoff
patent: 2002/0030221 (2002-03-01), Sandhu et al.
patent: 2002/0039826 (2002-04-01), Reinberg
patent: 2002/0086479 (2002-07-01), Reinberg
patent: 2002/0090779 (2002-07-01), Jang
patent: 2002/0098654 (2002-07-01), Durcan et al.
patent: 2002/0153614 (2002-10-01), Ema et al.
patent: 2002/0163026 (2002-11-01), Park
patent: 2003/0153146 (2003-08-01), Won et al.
patent: 2003/0178684 (2003-09-01), Nakamura
patent: 2003/0190782 (2003-10-01), Ko et al.
patent: 2003/0227044 (2003-12-01), Park
patent: 2004/0018679 (2004-01-01), Yu et al.
patent: 2004/0056295 (2004-03-01), Argarwal
patent: 2004/0150070 (2004-08-01), Okada et al.
patent: 2004/0188738 (2004-09-01), Farnworth et al.
patent: 2005/0051822 (2005-03-01), Manning
patent: 2005/0054159 (2005-03-01), Manning et al.
patent: 2005/0158949 (2005-07-01), Manning
patent: 2005/0287780 (2005-12-01), Manning et al.
patent: 2006/0014344 (2006-01-01), Manning
patent: 2006/0024958 (2006-02-01), Ali
patent: 2006/0046420 (2006-03-01), Manning
patent: 2006/0063344 (2006-03-01), Manning et al.
patent: 2006/0063345 (2006-03-01), Manning et al.
patent: 2006/0115951 (2006-06-01), Mosley
patent: 2006/0121672 (2006-06-01), Basceri et al.
patent: 2006/0186451 (2006-08-01), Dusberg et al.
patent: 2006/0211211 (2006-09-01), Sandhu et al.
patent: 2006/0261440 (2006-11-01), Manning
patent: 2006/0263968 (2006-11-01), Manning
patent: 2007/0032014 (2007-02-01), Sandhu et al.
patent: 2007/0048976 (2007-03-01), Raghu
patent: 2007/0099328 (2007-05-01), Chiang et al.
patent: 2007/0145009 (2007-06-01), Fucsko et al.
patent: 4447804 (2002-01-01), None
patent: 2004/040252 (2004-12-01), None
patent: WO US2004/027898 (2005-02-01), None
patent: WO2005/024936 (2005-03-01), None
patent: WO US2006/006806 (2006-02-01), None
patent: WO US2006/006806 (2006-07-01), None
patent: WO US2006/006806 (2007-03-01), None
Li, X. and Bohn, P.W., “Metal-assisted chemical etching in HF/H2O2produces porous silicon”, Applied Physics Letters, vol. 77, No. 16, Oct. 16, 2000, pp. 2572-2574.
John Banhart,Aluminum Foams: On the road to Real Applications, MRS Bulletin, pp. 290-295 (Apr. 2003).
L. J. Gibson (Guest Editor),Cellular Solids, MRS Bulletin, pp. 270-274 (Apr. 2003).
David J. Green et al.,Cellular Ceramics: Intriguing Structures, Novel Properties, and Innovative Applications, MRS Bulletin, pp. 296-300 (Apr. 2003).
PCT/US2004/027898; Filed: Aug. 26, 2004; PCT Search Report mailed Feb. 28, 2005; 4 pp.
U.S. Appl. No. 10/894,633, filed Jul. 19, 2004, Manning.
U.S. Appl. No. 10/928,931, filed Aug. 27, 2004, Busch et al.
U.S. Appl. No. 10/929,037, filed Aug. 27, 2004, Manning.
U.S. Appl. No. 11/006,331, filed Dec. 6, 2004, Basceri et al.
U.S. Appl. No. 11/083,489, filed Mar. 2005, Sandhu et al.
U.S. Appl. No. 11/131,552, filed May 2005, Manning.
U.S. Appl. No. 11/131,575, filed May 2005, Manning et al.
U.S. Appl. No. 11/360,540, filed Feb. 23, 2006, Rana.
U.S. Appl. No. 11/580,418, filed Oct. 11, 2006, Raghu et al.
“Novel Robust Cell Capacitor (Leaning Exterminated Ring Type Insulator) And New Storage Node Contact (Top Spacer Contact) For 70nm DRAM Technology And Beyond”; Park et al.; 2004 Symposium on VLSI Technology Digest of Technical Papers; Jul. 2004; pp. 34-35.
J. P. O'Sullivan et al.,The morphology and mechanism of formation of porous anodic films on aluminium, Proc. Roy. Soc. Lond. A, vol. 317, pp. 511-543 (1970).
S. Shingubara,Fabrication of nanomaterials using porous alumina templates, J. Nanoparticle Res., vol. 5, pp. 17-30 (2003).
S. Tan et al.,High Aspect Ratio Microstructures on Porous Anodic Aluminum Oxide, IEEE, pp. 267-272 (1995).
David J. Green et al.,The Structure and Applications of Cellular Ceramics, 28 MRS Bulletin, pp. 296-300, Apr. 2003).
Jeffrey M. Karp et al.,Scaffolds for Tissue Engineering, MRS Bulletin, pp. 301-302 (Apr. 2003).
E. Maire et al.,In Situ X-Ray Tomography M

Affiliated with

Also associated with

Rating

Methods of forming pluralities of capacitors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Methods of forming pluralities of capacitors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of forming pluralities of capacitors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3923791