Method and apparatus for inspecting semiconductor wafer

Details Method and apparatus for inspecting semiconductor wafer Method and apparatus for inspecting semiconductor wafer

2007-12-11

2007-12-11

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S100000, C700S108000

Reexamination Certificate

active

11318423

ABSTRACT:
A substrate inspection apparatus includes a recipe preparation unit that batch-allocates a plurality of slots containing substrates of each type with a corresponding one of a plurality of original recipes to the each type, the plurality of original recipes corresponding to different types of substrates respectively, so as to prepare an actual recipe based on the plurality of original recipes, and to inspect the different types of substrates according to the actual recipe.

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