4. Optics: measuring and testing
  5. By alignment in lateral direction

Yasunori Ikeno

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Method and apparatus for inspecting semiconductor wafer

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Repetitive call control method, switch using the method, and...

Telephonic communications – Diagnostic testing – malfunction indication – or electrical... – Of centralized switching system
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Semiconductor wafer inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Substrate processing apparatus and substrate processing system

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Substrate processing apparatus and substrate processing system

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2390085

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