4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Yasutoshi Kitahara

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Method and apparatus for inspecting semiconductor wafer

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Semiconductor wafer inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2927054

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