Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2007-09-11
2007-09-11
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S311000, C430S967000
Reexamination Certificate
active
10489411
ABSTRACT:
A method for nano-scale high resolution patterning of self-assembled monolayer using soft X-rays is provided. The method involves forming an aromatic imine molecular layer having substituents at its terminal rings on a substrate, selectively cleaving bonds to the subsituents of the aromatic imine molecular layer, and hydrolyzing the aromatic imine molecular layer
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Younan Xia et al.,Soft Lithography, 1988, 37, 550-575 Angew. Chem. Int. Ed.
Kang Tai Hee
Kim Bong-soo
Kim Ki Jeong
La Young Hye
Moon Joong Ho
Chacko-Davis Daborah
McPherson John A.
Postech Foundation
Rothwell, Figg Ernst & Manbeck, PC
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