Method of manufacturing ferroelectric film capacitor

Details Method of manufacturing ferroelectric film capacitor Method of manufacturing ferroelectric film capacitor

2007-03-27

2007-03-27

Fourson, George R. (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S240000, C438S253000, C438S393000, C438S396000, C438S686000, C438S942000

Reexamination Certificate

active

10996063

ABSTRACT:
A method of manufacturing a ferroelectric film capacitor includes forming a platinum film used as an electrode material over a whole surface of a silicon substrate, batch-etching the platinum film to form opposite electrodes that serve as a pair of capacitor electrodes, and embedding a ferroelectric film corresponding to a dielectric film of the capacitor into a portion interposed between the pair of opposite electrodes.

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