Micromechanical device and method of manufacture thereof

Details Micromechanical device and method of manufacture thereof Micromechanical device and method of manufacture thereof

2007-07-10

2007-07-10

Ngô, Ngân V. (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S052000, C438S700000

Reexamination Certificate

active

11155771

ABSTRACT:
A micromechanical switch comprises a substrate, at least one pair of support members fixed to the substrate, at least one pair of beam members placed in proximity and parallel to each other above the substrate, and connected to one of the support members, respectively, each of the beam members having a moving portion which is movable with a gap with respect to the substrate, and a contact portion provided on the moving portion, and a driving electrode placed on the substrate between the pair of beam members to attract the moving portions of the beam members in a direction parallel to the substrate with electrostatic force so that the contact portions of the beam members which are opposed to each other are short-circuited.

REFERENCES:
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K. Wang, et al. “VHF Free-Free Beam High-Q Micromechanical Resonators”, Technical Digest, 12thInternational IEEE Micro Electro Mechanical Systems Conference, Jan. 17-21, 1999, pp. 453-458.
Paul M. Zavracky, et al., “Micromechanical Switches Fabricated Using Nickel Surface Micromachining”, Journal of Micorelectromechanical Systems, vol. 6, No. 1, Mar. 1997, pp. 3-9.

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