MEMS tunable capacitor based on angular vertical comb drives

Details MEMS tunable capacitor based on angular vertical comb drives MEMS tunable capacitor based on angular vertical comb drives

2006-08-01

2006-08-01

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S272000, C361S278000, C361S287000, C361S290000, C361S292000, C333S134000, C333S135000, C333S174000

Reexamination Certificate

active

07085122

ABSTRACT:
A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.

REFERENCES:
patent: 5636099 (1997-06-01), Sugawara et al.
patent: 5640133 (1997-06-01), MacDonald et al.
patent: 5901031 (1999-05-01), Ishige et al.
patent: 6683513 (2004-01-01), Shamsaifar et al.
patent: 6690568 (2004-02-01), Johnson

Affiliated with

Also associated with

Rating

MEMS tunable capacitor based on angular vertical comb drives does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS tunable capacitor based on angular vertical comb drives, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS tunable capacitor based on angular vertical comb drives will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3713755