4. Optical: systems and elements
  5. Deflection using a moving element
  6. By moving a reflective element

Doo-Young Hah

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MEMS tunable capacitor based on angular vertical comb drives

Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Reexamination Certificate

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Scanning micromirror for optical communication systems and...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2795999

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