4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Pamela R. Patterson

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Low frequency quartz based MEMS resonators and method of...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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MEMS tunable capacitor based on angular vertical comb drives

Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Reexamination Certificate

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Method for controlling a collimated sputtering source

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1420078

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