Semiconductor device and method for fabricating the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C438S210000, C438S396000, C438S760000, C438S761000, C438S778000

Reexamination Certificate

active

07115468

ABSTRACT:
A semiconductor device and a fabricating method for the same are disclosed, in which when forming a capacitor sacrificial film pattern, even if a misalignment occurs, the degradation of the dielectric property due to a direct contact between the contact plug and the dielectric medium can be prevented. The semiconductor device includes a connecting part connected through an insulating layer of a substrate to a conductive layer, a seed separating layer formed around the connecting part and the insulating layer to provide an open region exposing at least part of the connecting part, a seed layer filled into the open region of the seed separating layer and a capacitor. The capacitor includes of a lower electrode formed upon the seed layer, a dielectric medium formed upon the lower electrode, and an upper electrode formed upon the dielectric medium.

REFERENCES:
patent: 5618761 (1997-04-01), Eguchi et al.
patent: 6051859 (2000-04-01), Hosotani et al.
patent: 6066528 (2000-05-01), Fazan et al.
patent: 6297122 (2001-10-01), Eguchi et al.
patent: 6500750 (2002-12-01), Shroff et al.
patent: 2002/0004293 (2002-01-01), Soininen et al.
patent: 2004/0235255 (2004-11-01), Tanaka et al.

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