Systems and methods for measurement or analysis of a...

Details Systems and methods for measurement or analysis of a... Systems and methods for measurement or analysis of a...

2006-06-27

2006-06-27

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

C250S252100, C378S070000, C356S326000

Reexamination Certificate

active

07067819

ABSTRACT:
A system configured for measurement of a specimen is provided. The system includes an optical subsystem configured to perform measurements of the specimen. The optical subsystem includes a light source that is configured to generate light having a relatively large number of separated spectral peaks with substantially no continuous background. In some embodiments, the light may include vacuum ultraviolet light, extreme ultraviolet light, and/or soft x-rays. A carrier medium is also provided that includes program instructions executable on a computer system to analyze data generated by a detector of an optical subsystem by partitioning the data into individual peaks spaced apart across a wavelength spectrum. Partitioning the data preferably corrects for spectrum shift, drift, stretching, shrinking, or a combination thereof at the detector. The individual peaks correspond to separated spectral peaks in light generated by a light source of the optical subsystem.

REFERENCES:
patent: 4905170 (1990-02-01), Forouhi et al.
patent: 4999014 (1991-03-01), Gold et al.
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5181080 (1993-01-01), Fanton et al.
patent: 5486701 (1996-01-01), Norton et al.
patent: 5489980 (1996-02-01), Anthony
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5747813 (1998-05-01), Norton
patent: 5771094 (1998-06-01), Carter et al.
patent: 5877859 (1999-03-01), Aspnes et al.
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 5953446 (1999-09-01), Opsal et al.
patent: 6052401 (2000-04-01), Wieser et al.
patent: 6177995 (2001-01-01), Compain et al.
patent: 6181421 (2001-01-01), Aspnes et al.
patent: 6184984 (2001-02-01), Lee et al.
patent: 6211957 (2001-04-01), Erdogan et al.
patent: 6261853 (2001-07-01), Howell et al.
patent: 6269144 (2001-07-01), Dube et al.
patent: 6282222 (2001-08-01), Wieser et al.
patent: 6325078 (2001-12-01), Kamieniecki
patent: 6400089 (2002-06-01), Salvermoser et al.
patent: 6440760 (2002-08-01), Cho et al.
patent: 6456362 (2002-09-01), Banine
patent: 6515746 (2003-02-01), Opsal et al.
patent: 6519045 (2003-02-01), Kwon
patent: 6522717 (2003-02-01), Murakami et al.
patent: 6532076 (2003-03-01), Sidorowich
patent: 6535286 (2003-03-01), Green et al.
patent: 6555485 (2003-04-01), Liu et al.
patent: 6559007 (2003-05-01), Weimer
patent: 6583876 (2003-06-01), Opsal et al.
patent: 6591024 (2003-07-01), Westbrook
patent: 6610614 (2003-08-01), Niimi et al.
patent: 6610615 (2003-08-01), McFadden et al.
patent: 6611330 (2003-08-01), Lee et al.
patent: 6624393 (2003-09-01), Howell et al.
patent: 6633831 (2003-10-01), Nikoonahad et al.
patent: 6710354 (2004-03-01), Koch et al.
patent: 2002/0018217 (2002-02-01), Weber-Grabau et al.
patent: 2003/0137662 (2003-07-01), Janik et al.
patent: 2004/0150820 (2004-08-01), Nikoonahad et al.
patent: 99/45340 (1999-09-01), None
patent: 00/65331 (2000-11-01), None
patent: 02/25723 (2002-03-01), None
Gullikson, E. et al. “A Soft X-ray/EUV Reflectometer Based on a Laser Produced Plasma Source”. Journal of X-ray Science and Technology 3, (1992), pp. 283-299.
OBB Light Sources—Lamp Emission Spectra. Datasheet [online]. Photon Technology International, 2004 [retrieved on Jul. 14, 2005]. Retrieved from the Internet: <URL:http://www.pti-nj.com/obb—spectra.html>.
Samson et al.,Vacuum Ultraviolet Spectroscopy I, © 1998 by Academic Press, pp. 77.
International Search Report, PCT/US2005/016843, mailed Jan. 20, 2006.

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